News & Stories

In a breakthrough set to revolutionize the semiconductor industry, the School of Engineering of the Hong Kong University of Science and Technology (HKUST) has developed the world’s first-of-its-kind deep-ultraviolet (UVC) microLED display array for lithography machines. This enhanced efficiency UVC microLED has showcased the viability of a lowered cost maskless photolithography through the provision of adequate light output power density, enabling exposure of photoresist films in a shorter time.  Conducted under the supervision of Prof. KWOK Hoi-Sing, Founding Director of the State Key Laboratory of Advanced Displays and Optoelectronics Technologies at HKUST, the study was a collaborative effort with the Southern University of Science and Technology, and the Suzhou Institute of Nanotechnology of the Chinese Academy of Sciences.

The Hong Kong University of Science and Technology (HKUST) Prof. Kei-May LAU, Professor Emerita of the Department of Electronic and Computer Engineering and Research Professor of the Division of Emerging Interdisciplinary Areas, has been elected as a member of the US National Academy of Engineering (NAE), one of the highest professional distinctions accorded to an engineer, the organization points out.